Orbis Vapour Phase Etch Tools
Memsstar’s Orbis dry release etch process tools are available using vapor Hydrogen Fluoride (HF) andXenon DiFluoride (XeF2) chemistries.
Available in variants Alpha, 1000 and 3000.
The new generation of ORBIS platforms enable the most advanced processing capability from research, to commercial R&D through to high-volume manufacturing.
The ORBIS platform approach delivers many benefits to our customers, such as:
1. Upgrade paths from R&D through to full-scale production
2. Cost-effective solutions—lab or fab
3. Seamless process transfer—from lab to fab
4. Low cost of ownership