Aurix Self Assembled Monolayer Coating

Aurix Self Assembled Monolayer coating for Anti-Stiction Coatings for MEMS

Company: Memsstar

AURIX dry, vapor-phase SAM coatings offer major advantages over traditional wet chemical coatings. In particular, the vacuum deposition environment eliminates issues of moisture variation, crucial in creating repeatable and robust surface coatings.

Precision-tuned processes, with patented control, reduce the amounts of chemicals used, offer superior surface properties and improved surface energy control.

With AURIX, SAM coatings can be created immediately following the release etching process. This enables the MEMS structure to be treated without breaking process-vacuum, maximizing yield.

Our results have consistently demonstrated superior film characteristics, with durability, coverage and yield, when compared with wet chemical approaches.